Customized specification with an inlet diameter of 2200mm. (CF-Σ Standerd specification is up to 1000mm)

• N₂Purge and 30KPa airtight specifications.
  (0.6MPa maximum proven)
  
  
• Inner feeder,polishing with BUFF#320
  (The highest grade BUFF#400 available)
  
  
• Each secondary feeder can have a different feeding capability.